Abstract
We fabricate polycrystalline anatase microring resonators with loaded quality factors as high as 25,000 and average losses of in the telecommunications band. Additionally, we measure a negative thermo-optic coefficient of . The presented fabrication uses CMOS-compatible lithographic techniques that take advantage of substrate-independent, non-epitaxial growth. These properties make polycrystalline anatase a promising candidate for the implementation of athermal, vertically integrated, CMOS-compatible nanophotonic devices for nonlinear applications.
© 2015 Optical Society of America
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