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Characterization of high performance integrated optically addressed spatial light modulators

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Abstract

An improved design for optically addressed multiple-quantum-well spatial light modulators is reported. These integrated AlGaAs modulators are of high optical quality and are simple to fabricate. They exhibit excellent performance characteristics such as 10:1 reflection contrast ratio, 1.5% diffraction efficiency, 7-μm spatial resolution, and illumination sensitivity less than 1 μJ/cm2. Additionally, a new mode of operation is reported that dramatically improves the optical response of these devices at low frequencies. A new physical model is proposed that accurately describes the modulation process.

© 1998 Optical Society of America

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