Abstract

Recently a number of second-harmonic-generation (SHG) experiments on (thick) oxide films on Si were performed as studies of the possible presence of strain, crystalline SiO₂, a static electric field, and roughness at the Si–SiO₂ interface. Large enhancements of the SHG anisotropy have been observed for thick oxide films. We show here that the SHG for thick thermal oxide films on Si(111) as a function of oxide thickness and angle of incidence is dominated by linear optics, owing to multiple reflections in the oxide film.

© 1995 Optical Society of America

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